MEMS/NEMS: Medical applications and MOEMS

acoustic actuator alignment applications array bimorph bimorph beam cantilever capacitive catheter cavitation cavity circuit coefficient comb fingers combdrive convection developed diaphragm drug delivery effect electrical electrode electromagnetic electrostatic actuators electrothermal element endoscope energy enhance equation etching experimental fabrication process frequency glaucoma heat IEEE imaging implant increase integrated interferometer Journal of Microelectromechanical Journal of Micromechanics Laser layer lumped element model magnetic material measurement mechanical membrane MEMS method micro microactuators Microelectromechanical Systems micromirror microneedles mirror plate module operation optical fiber optical switches output parameters piezoelectric piezoresistive piezoresistor planar polymer polysilicon pressure sensor ratio reflection release resistor resonant rotation angle scanning Sensors and Actuators shape memory alloy shown in Figure signal silicon simulation SiO2 skin sonophoresis device stress structure substrate techniques temperature thermal resistance thickness torsion beams torsion micro-mirrors transdermal drug delivery transducer ultrasonic ultrasound valve actuator vertical voltage wafer