Microsystem design
It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems.
xxvi, 689 pages : illustrations ; 24 cm
9780792372462, 9781475774580, 9780306476013, 0792372468, 1475774583, 0306476010
45086966
Getting Started.- An Approach to Mems Design.- Microfabrication.- Process Integation.- Modeling Strategies.- Lumped Modeling with Circuit Elements.- Energy-conserving Transducers.- Lumped-element System Dynamics.- Domain-Specific Details.- Elasticity.- Structures.- Energy Methods.- Dissipation and the Thermal Energy Domain.- Lumped Modeling of Dissipative Processes.- Fluids.- Circuit and System Issues.- Electronics.- Feedback Systems.- Noise.- Case Studies.- Packaging.- A Piezoresistive Pressure Sensor.- A Capacitive Accelerometer.- Electrostatic Projection Displays.- A Piezoelectric Rate Gyroscope.- Microsystems for DNA Amplification.- A Microbridge Combustible-gas Sensor.